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pro vyhledávání: '"Kun Sik Park Park"'
Autor:
Jong Moon Park Park, Kun Sik Park Park, Byung Whan Kim Kim, Yoon Kyu Kyu, Seong Wook Yoo, Kwang Ho Kwon Kwon, Sung Ku Kwon Kwon
Publikováno v:
ETRI Journal. 24:211-220
This study characterizes an oxide etching process in a magnetically enhanced reactive ion etching (MERIE) reactor with a CHF 3 /CF 4 gas chemistry. We use a statistical 2 4-1 experimental design plus one center point to characterize the relationships
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7f6b4542e8eca8f6cea99feaeb7434cd
https://doi.org/10.4218/etrij.02.0102.0305
https://doi.org/10.4218/etrij.02.0102.0305
