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Publikováno v:
Computers & Chemical Engineering. 52:112-121
Semiconductor manufacturing is one of the fastest-growing industries today. As the recent requirements for feature sizes and wafer sizes change rapidly, it becomes imperative to configure increasingly intricate control schemes to maintain product qua
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bf208076a354549ada6ac2a1b32aa813
https://doi.org/10.1016/j.compchemeng.2012.12.009
https://doi.org/10.1016/j.compchemeng.2012.12.009
