Helium field ion source for application in a 100 keV focused ion beam system.

Autor: Sakata, Takahide, Kumagai, Kiyohito, Naitou, Motohiro, Watanabe, Iwao, Ohhashi, Yuu, Hosoda, Osamu, Kokubo, Yasushi, Tanaka, Kazumitsu

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1992, Vol. 10 Issue 6, p2842-2845, 4p