Nanopatterning: Commercial and Technological Promise

Autor: Eijkel, Kees, Hruby, Jill, Kubiak, Glen, Scott, M., Saile, Volker, Walsh, Steven

Publikováno v: The Journal of Microlithography, Microfabrication, and Microsystems; January 2006, Vol. 5 Issue: 1 p11001-011001-2