Zobrazeno 1 - 10
of 72
pro vyhledávání: '"Kubenz M"'
Autor:
Kehagias, N., Chansin, G., Reboud, V., Zelsmann, M., Schuster, C., Kubenz, M., Reuther, F., Gruetzner, G., Sotomayor Torres, C.M.
Publikováno v:
In Microelectronic Engineering 2007 84(5):921-924
Publikováno v:
In Microelectronic Engineering 2005 78:496-502
Publikováno v:
In Microelectronic Engineering 2004 73:456-462
Publikováno v:
In Microelectronic Engineering 2003 67:495-501
Publikováno v:
Journal of Physics: Conference Series. 34:897-903
We report on fabrication of nanoimprint stamps for fabrication of two dimensional photonic crystals in visible range of spectra. Nanoimprint stamps made of silicon and/or nickel were successfully fabricated using electron beam lithography and advance
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1be389576d1ec28621d30eccf80f9491
https://doi.org/10.1088/1742-6596/34/1/149
https://doi.org/10.1088/1742-6596/34/1/149
Autor:
Reboud, V., Kehagias, N., Zelsmann, M., Lovera, P., Schuster, C., Kubenz, M., Reuther, F., Gruetzner, G., Redmond, G., Sotomayor Torres, C.M
Publikováno v:
Materials Research Society conference-MRS 2007, Fall Meeting
Materials Research Society conference-MRS 2007, Fall Meeting, 2007, boston, United States
Materials Research Society conference-MRS 2007, Fall Meeting, 2007, boston, United States
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::ec588b98d6e14dbc6c36bcecaf58d049
https://hal.archives-ouvertes.fr/hal-00396810
https://hal.archives-ouvertes.fr/hal-00396810
Autor:
Kehagias, N., Reboud, V., Chansin, G., Zelsmann, M., Jeppesen, C., Schuster, C., Kubenz, M., Reuther, F., Gruetzner, C.M., Sotomayor Torres, C.M
Publikováno v:
Microprocesses and Nanotechnology Conference-MNC 2007
Microprocesses and Nanotechnology Conference-MNC 2007, 2007, kyoto, Japan
Microprocesses and Nanotechnology Conference-MNC 2007, 2007, kyoto, Japan
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::2553ad93b3805f061724d2d71db4824f
https://hal.archives-ouvertes.fr/hal-00394539
https://hal.archives-ouvertes.fr/hal-00394539
Autor:
Kehagias, N., Reboud, V., Chansin, G., Zelsmann, M., Schuster, C., Kubenz, M., Reuther, F., Gruetzner, G., Sotomayor, C.M.
Publikováno v:
Electron, Ion, and Photon Beam technology and Nanofabrication conference-EIPBN 2007
Electron, Ion, and Photon Beam technology and Nanofabrication conference-EIPBN 2007, 2007, denver, United States
Electron, Ion, and Photon Beam technology and Nanofabrication conference-EIPBN 2007, 2007, denver, United States
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::0b792b20ab7e09ff3a2751046aa4db29
https://hal.archives-ouvertes.fr/hal-00394563
https://hal.archives-ouvertes.fr/hal-00394563
Autor:
Kehagias, N., Reboud, V., Chansin, G., Zelsmann, M., Jeppesen, C., Schuster, C., Kubenz, M., Reuther, F., Gruetzner, G., Sotomayor Torres, C.M
Publikováno v:
Micro-and Nano-Engineering conference-MNE 2007
Micro-and Nano-Engineering conference-MNE 2007, 2007, copenhague, Denmark
Micro-and Nano-Engineering conference-MNE 2007, 2007, copenhague, Denmark
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::ec836ae935c9fe661a812ca1a8fad4ea
https://hal.archives-ouvertes.fr/hal-00396809
https://hal.archives-ouvertes.fr/hal-00396809
Autor:
Kehagias, N., Chansin, G., Reboud, V., Kehoe, T., Zelsmann, M., Schuster, C., Kubenz, M., Fink, M., Reuther, F., Gruetzner, G., Sotomayor, C.M.
Publikováno v:
Nanoimprint and Nanoprint Technology conference-NNT 2006
Nanoimprint and Nanoprint Technology conference-NNT 2006, Nov 2006, san francisco, United States
Nanoimprint and Nanoprint Technology conference-NNT 2006, Nov 2006, san francisco, United States
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::135ccd3c295c32a319f1fed77abcf596
https://hal.archives-ouvertes.fr/hal-00394555
https://hal.archives-ouvertes.fr/hal-00394555