Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Krzysztof Turczyk"'
Publikováno v:
2021 34th International Vacuum Nanoelectronics Conference (IVNC).
The paper presents the concept of a miniature X-ray source fabricated entirely in the MEMS technology. Our construction integrates all the components, including high vacuum micropump, on a single silicon-glass chip. The source generates a conical X-r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8051cb59c60f8cffeb0e8ff58f5dcbff
https://doi.org/10.1109/ivnc52431.2021.9600697
https://doi.org/10.1109/ivnc52431.2021.9600697
Publikováno v:
Vacuum. 178:109452
This paper presents a pressure control system designed for MEMS (Micro-Electro-Mechanical System) devices working in vacuum conditions, especially for a currently developed miniature mass spectrometer. It is based on an idea to set the vacuum level i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bf5a66085bb62339b3d107fdf61bb3ea
https://doi.org/10.1016/j.vacuum.2020.109452
https://doi.org/10.1016/j.vacuum.2020.109452