Zobrazeno 1 - 10
of 35
pro vyhledávání: '"Krzysztof M, Nowak"'
Autor:
Reyes Myrna, Parviz Tayebati, Francisco Villarreal-Saucedo, Bien Chann, Zhou Wang-Long, Krzysztof M. Nowak
Publikováno v:
Laser Beam Shaping XVIII.
This paper presents our latest experimental results of welding and cutting of steel and aluminum using a High Power, High Brightness Direct Diode Laser (DDL) upgraded with a Laser-Integrated Dynamic Beam Shaper (DBS). TeraDiode’s DDLDBS laser syste
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1d5600ba45f0ec9e88f92d5c21aaf06b
https://doi.org/10.1117/12.2322912
https://doi.org/10.1117/12.2322912
Autor:
Krzysztof M. Nowak, Yutaka Shiraishi, Tatsuya Yanagida, Yasufumi Kawasuji, Tamotsu Abe, Tsukasa Hori, Hiroshi Tanaka, Taku Yamazaki, Yukio Watanabe, Takashi Saitou, Georg Soumagne, Hakaru Mizoguchi, Tsuyoshi Yamada, Takeshi Kodama, Hiroaki Nakarai
Publikováno v:
2018 China Semiconductor Technology International Conference (CSTIC).
We have been developing CO 2 -Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL. Unique and original technologies such as; combination of pulsed CO2 laser and Sn droplets, dual wavelength
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::57896cb6a52be846d2b3a78e7151e1a5
https://doi.org/10.1109/cstic.2018.8369210
https://doi.org/10.1109/cstic.2018.8369210
Autor:
Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Krzysztof M. Nowak, Yasufumi Kawasuji, Hiroshi Tanaka, Yukio Watanabe, Tsukasa Hori, Takeshi Kodama, Yutaka Shiraishi, Tatsuya Yanagida, Tsuyoshi Yamada, Taku Yamazaki, Shinji Okazaki, Takashi Saitou
Publikováno v:
SPIE Proceedings.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cb31e2ea4a1f055cc7c9472010b82233
https://doi.org/10.1117/12.2256652
https://doi.org/10.1117/12.2256652
Autor:
Takeshi Okamoto, Tsukasa Hori, Yutaka Shiraishi, Yukio Watanabe, Taku Yamazaki, Hiroaki Nakarai, Hakaru Mizoguchi, Takashi Saitou, Takeshi Kodama, Hiroshi Tanaka, Krzysztof M. Nowak, Tamotsu Abe, Yasufumi Kawasuji, Shinji Okazaki
Publikováno v:
SPIE Proceedings.
13.5nm wavelength, CO2-Sn-LPP EUV light source which is the most promising solution for the source capable of enabling high-volume-manufacturing of semiconductor devices with critical layers patterned with sub-10nm resolution. Our source incorporates
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b27d1dd3291308bd7b284c1e38aa8e5c
https://doi.org/10.1117/12.2257808
https://doi.org/10.1117/12.2257808
Autor:
Taku Yamazaki, Hiroaki Nakarai, Tamotsu Abe, Krzysztof M Nowak, Yasufumi Kawasuji, Takeshi Okamoto, Hiroshi Tanaka, Yukio Watanabe, Tsukasa Hori, Takeshi Kodama, Tatsuya Yamagida, Yutaka Shiraishi, Takashi Saitou, Hakaru Mizoguchi
Publikováno v:
2017 China Semiconductor Technology International Conference (CSTIC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::53ba625ee3f283f366466336638d7501
https://doi.org/10.1109/cstic.2017.7919759
https://doi.org/10.1109/cstic.2017.7919759
Autor:
Junichi Fujimoto, Hakaru Mizoguchi, Yoshiaki Kurosawa, Hiroaki Nakarai, Yasufumi Kawasuji, Saito Takashi, Krzysztof M. Nowak, Takashi Suganuma
Publikováno v:
Optics letters. 41(13)
One of the unique features of the quantum-cascade-laser-seeded, nanosecond-pulse COsub2/sublaser, invented for the purpose of generation of extreme UV by laser-produced-plasma, is a robust synthesis of arbitrary pulse waveforms. In the present Letter
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e58053a7319c105a0aa6d63078528f55
https://pubmed.ncbi.nlm.nih.gov/27367116
https://pubmed.ncbi.nlm.nih.gov/27367116
Autor:
Taku Yamazaki, Takeshi Kodama, Takashi Saitou, Yutaka Shiraishi, Tsuyoshi Yamada, Tsukasa Hori, Tamotsu Abe, Yasufumi Kawasuji, Hiroaki Nakarai, Krzysztof M. Nowak, Shinji Okazaki, Hakaru Mizoguchi, Yukio Watanabe, Tatsuya Yanagida, Hiroshi Tanaka
Publikováno v:
Extreme Ultraviolet (EUV) Lithography VII.
We have been developing CO2-Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL since 2003. Unique original technologies such as; combination of pulsed CO2 laser and Sn droplets, dual wavele
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::720aab954e03d97706d7c1c23651b804
https://doi.org/10.1117/12.2218405
https://doi.org/10.1117/12.2218405
Publikováno v:
Applied Physics A. 103:1033-1046
New experimental results in support of the universal mechanism of “cold” laser ablation for machining of various commercial green ceramic materials (LTCC) are presented in this paper. The “cold” ablation model was mathematically formulated an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2791c54359f5c42fbfbe5627ddb2db67
https://doi.org/10.1007/s00339-010-6028-y
https://doi.org/10.1007/s00339-010-6028-y
Publikováno v:
Applied Physics A. 91:341-348
This paper reports calculations of predicted values of the key process parameters associated with “cold” laser ablation of ceramic materials in the green state. A model for material removal of composite organic/ceramic materials is proposed and v
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fb30e0450376197ebe557acde33a6664
https://doi.org/10.1007/s00339-008-4412-7
https://doi.org/10.1007/s00339-008-4412-7