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pro vyhledávání: '"Krystyna Studzińska"'
Autor:
Piotr Grabiec, Krystyna Studzińska, Michał Zaborowski, Stanisław Mitura, Steffen Biehl, Peter Hudek, Ivan Kostic, Andrzej Jakubowski, Ivo W. Rangelow
Publikováno v:
Journal of Telecommunications and Information Technology, Iss 1 (2001)
A new method for the fabrication of field emis- sion arrays (FEA) based on bulk/surface silicon micromachin- ing and diamond-like-carbon (DLC) coating was developed. A matrix of self-aligned electron field emitters is formed in sil- icon by mean anis
Externí odkaz:
https://doaj.org/article/4a9673666ab14d359f31aff289d3d338