Etch depth estimation of large-period silicon gratings with multivariate calibration of rigorously simulated diffraction profiles

Autor: Naqvi, S. S. H., Franke, J. E., Haaland, D. M., Gottscho, R. A., Kornblit, A., Niemczyk, T. M., Krukar, R. H., McNeil, J. R.

Publikováno v: Journal of the Optical Society of America A: Optics, Image Science & Vision; September 1994, Vol. 11 Issue: 9 p2485-2493, 9p