Výsledky vyhledávání - "Kriti K. Kohli"

Automated detection and classification of printing sub-resolution assist features using machine learning algorithms

Autor: Ioana Graur, Mark Jobes, Kriti K. Kohli

Publikováno v: SPIE Proceedings.

Sub-Resolution Assist Feature (SRAF) printing is a critical yield detractor and known issue in OPC technology. SRAF print avoidance models can be used to determine where undesirable printing is likely to occur, but such models lack the necessary robu

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::483c932bf1072f2b230ee2884c428583
https://doi.org/10.1117/12.2261417

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Investigation on critical thickness dependence of ALD TiN diffusion barrier in MOL

Autor: Archana Subramaniyan, Neal A. Makela, Richard Murphy, Christopher C. Parks, Anita Madan, Domingo A. Ferrer Luppi, Frieder H. Baumann, Lawrence Bauer, Kriti K. Kohli

Publikováno v: 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).

Titanium nitride (TiN), a refractory material is actively been used as a diffusion barrier in Middle-of-the-Line (MOL) contacts. In the typical MOL stack (titanium (Ti)/TiN/tungsten(W)), it acts as a fluorine (F) diffusion barrier and also as an adhe

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::3790fe6b4261c3e21bb5e476e5cc37a8
https://doi.org/10.1109/asmc.2016.7491156

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