Investigations of the isotropic etch of an ICP source for silicon microlens mold fabrication

Autor: Jan Tue Ravnkilde, Ole Hansen, Kristian Pontoppidan Larsen

Publikováno v: Journal of Micromechanics and Microengineering. 15:873-882

This work investigates the isotropic etching properties of an inductively coupled plasma (ICP) etcher for masked and maskless etching steps in reference to fabrication of a silicon microlens mold. Using the described method a wide range of lens geome

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::44ae1d14839a71098aec0be46659889a
https://doi.org/10.1088/0960-1317/15/4/028

Study of the roughness in a photoresist masked, isotropic, SF6-based ICP silicon etch

Autor: Dirch Hjorth Petersen, Kristian Pontoppidan Larsen, Ole Hansen

Publikováno v: Larsen, K P, Petersen, D H & Hansen, O 2006, ' Study of the roughness in a photoresist masked, isotropic, SF6-based ICP silicon etch ', Journal of The Electrochemical Society, vol. 153, no. 12, pp. G1051-G1058 . https://doi.org/10.1149/1.2357723

In this paper we study the etching behavior and the resulting roughness in photoresist-masked isotropic silicon plasma etch performed in an inductively coupled plasma (ICP) etcher using SF6. We report detailed observations of the resulting roughness

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2f18b5872a9523ba6271ecee079e151c
https://orbit.dtu.dk/en/publications/f2c1866f-a709-4199-b8fe-6f0b0c02b0ef

Devices for fatigue testing of electroplated nickel (MEMS)

Autor: Jan Tue Ravnkilde, Morten Ginnerup, Kristian Pontoppidan Larsen, Ole Hansen

Publikováno v: Larsen, K P, Ravnkilde, J T, Ginnerup, M & Hansen, O 2002, Devices for fatigue testing of electroplated nickel (MEMS) . in The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002. . IEEE, pp. 443-446, 15th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, United States, 20/01/2002 . https://doi.org/10.1109/MEMSYS.2002.984298
ResearcherID
Scopus-Elsevier

In-situ fatigue test devices with integrated electrostatic actuator were fabricated in electroplated nanocrystalline nickel (nano-nickel). The devices feature in-plane approximately pure bending with fixed displacement of the test specimen of the dim

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::001eb1a5890ba755a1748485962c36c2
https://doi.org/10.1109/memsys.2002.984298