The Nanolithography Toolbox

Autor: Christopher H. Ray, Ian Gilbert, Kartik Srinivasan, David A. Czaplewski, Brian A. Bryce, Krishna C. Balram, Christopher B. Wallin, Meredith Metzler, Slava Krylov, Karen E. Grutter, Leonidas E. Ocola, Vladimir A. Aksyuk, Juraj Topolancik, Thomas Michels, Richard Kasica, Neal A. Bertrand, J. Alexander Liddle, Nicolae Lobontiu, Liya Yu, Marcelo Davanco, Gregory Simelgor, Yuxiang Liu, Gerald G. Lopez, Daron A. Westly, Samuel M. Stavis, Vojtech Svatos, Kristen A. Dill, B. Robert Ilic, Qing Li, Pavel Neuzil

Publikováno v: J Res Natl Inst Stand Technol
Balram, K C, Westly, D A, Davanço, M, Grutter, K E, Li, Q, Michels, T, Ray, C H, Yu, L, Kasica, R J, Wallin, C B, Gilbert, I J, Bryce, B A, Simelgor, G, Topolancik, J, Lobontiu, N, Liu, Y, Neuzil, P, Svatos, V, Dill, K A, Bertrand, N A, Metzler, M G, Lopez, G, Czaplewski, D A, Ocola, L, Srinivasan, K A, Stavis, S M, Aksyuk, V A, Alexander Liddle, J, Krylov, S & Robert Ilic, B 2016, ' The Nanolithography Toolbox ', Journal of Research of the National Institute of Standards and Technology, vol. 121, pp. 464-475 . https://doi.org/10.6028/jres.121.024

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Stan

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5b4c75e2e313e94390a1f54516b55354
https://pubmed.ncbi.nlm.nih.gov/34434635