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pro vyhledávání: '"Kristel Möldre"'
Autor:
Aivar Tarre, Jaan Aarik, Raul Rammula, Hugo Mändar, Ahti Niilisk, Kristel Möldre, Lauri Aarik
Publikováno v:
Journal of Crystal Growth. 428:86-92
Atomic layer deposition of TiO 2 from TiCl 4 and ozone on single crystal α-Al 2 O 3 substrates was investigated and the possibility to control the phase composition by the substrate orientation was demonstrated. Epitaxial growth of rutile and high-p
Publikováno v:
Acta Crystallographica Section A Foundations and Advances. 71:s520-s520
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 31:01A118
Using atomic layer deposition technique, epitaxial titania polymorph TiO2 II was grown on α-Al2O3(0 0 1) (c-sapphire) substrates. TiCl4 and H2O served as precursors. The growth temperature ranged from 350 to 680 °C. Raman scattering and high-resolu