Zobrazeno 1 - 10 of 77 pro vyhledávání: '"Kreider, K.G."'
1
Conference
Calibration of Low Temperature Cable-Less Lightpipe Pyrometer on the NIST PEB Test Bed Between 50 ?C and 230 ?C.
Autor: Tsai, B.K., Kreider, K.G., Kimes, W.A.
Publikováno v: 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors; 2006, p299-303, 5p
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2
Conference
Emissivity compensated pyrometry for specular silicon surfaces on the NIST RTP test bed.
Autor: Tsai, B.K., Bodycomb, J., DeWitt, D.P., Kreider, K.G., Kimes, W.A.
Publikováno v: 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004; 2004, p167-172, 6p
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3
Conference
In situ calibration of lightpipe radiometers for rapid thermal processing between 300°C to 700°C.
Autor: Kimes, W.A., Kreider, K.G., Ripple, D.C., Tsai, B.K.
Publikováno v: 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004; 2004, p156-161, 6p
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4
Conference
Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools.
Autor: Kreider, K.G., Chen, D.H., DeWitt, D.P., Kimes, W.A., Tsai, B.K.
Publikováno v: AIP Conference Proceedings; 2003, Vol. 683 Issue 1, p200-204, 5p
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5
Conference
Lightpipe proximity effects on Si wafer temperature in rapid thermal processing tools.
Autor: Kreider, K.G., Chen, D.H., DeWitt, D.P., Kimes, W.A., Tsai, B.K.
Publikováno v: 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors. RTP 2003; 2003, p125-129, 5p
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6
Conference
Effects of wafer emissivity on rapid thermal processing temperature measurement.
Autor: Chen, D.H., DeWitt, D.P., Tsai, B.K., Kreider, K.G., Kimes, W.A.
Publikováno v: 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors; 2002, p59-67, 9p
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7
Conference
Effects of wafer emissivity on lightpipe radiometry in RTP tools.
Autor: Kreider, K.G., Allen, D.W., Chen, D.H., DeWitt, D.P., Meyer, C.W., Tsai, B.K.
Publikováno v: 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001; 2001, p163-168, 6p
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8
Conference
Selected-area Deposition Of Multiple Active Films For Conductometric Microsensor Arrays.
Autor: Semancik, S., Cavicchi, R.E., Kreider, K.G., Suehle, J.S., Chaparala, P.
Publikováno v: Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 1, p831-834, 4p
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9
Conference
Optimized Temperature Pulse Sequences For The Enhancement Of Chemically-specific Response Patterns From Micro-hotplate Gas Sensors.
Autor: Cavicchi, R.E., Suehle, J.S., Kreider, K.G., Gaitan, M., Chaparala, P.
Publikováno v: Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 1, p823-826, 4p
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10
Akademický článek
Sputtered amorphous carbon nitride films.
Autor: Kreider, K.G., Tarlov, M.J., Gillen, G.J., Poirier, G.E., Robins, L.H., Ives, L.K., Bowers, W.D., Marinenko, R.B., Smith, D.T.
Publikováno v: Journal of Materials Research; 12/01/1995, Vol. 10 Issue 12, p3079-3083, 5p
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