Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Krechmer, Alex"'
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 6, p2715-2719, 5p
Autor:
Casey, J. David, Phaneuf, Michael, Chandler, Clive, Megorden, Michael, Noll, Kathryn E., Schuman, Richard, Gannon, Thomas J., Krechmer, Alex, Monforte, David, Antoniou, Nicholas, Bassom, Neil, Li, Jian, Carleson, Peter, Huynh, Chuong
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 6, p2682-2685, 4p