Role of ion accumulation in lofting of submicrometer-sized dielectric particle from dielectric surface by plasma and low-energy electron beam.

Autor: Krainov, Pavel, Ivanov, Vladimir, Astakhov, Dmitry, Medvedev, Slava, van de Kerkhof, Mark

Publikováno v: Proceedings of SPIE; 1/18/2022, Vol. 12051, p1205103-1205103, 1p

Charging and Mobilization of Dust Particles on a Surface in Plasma.

Autor: Pagán Muñoz JH; NASA SSERVI's Institute for Modeling Plasma, Atmospheres and Cosmic Dust (IMPACT), University of Colorado, Boulder, Colorado 80303, USA.; Laboratory for Atmospheric and Space Physics (LASP), University of Colorado, Boulder, Colorado 80303, USA., Wang X; NASA SSERVI's Institute for Modeling Plasma, Atmospheres and Cosmic Dust (IMPACT), University of Colorado, Boulder, Colorado 80303, USA.; Laboratory for Atmospheric and Space Physics (LASP), University of Colorado, Boulder, Colorado 80303, USA., Horányi M; NASA SSERVI's Institute for Modeling Plasma, Atmospheres and Cosmic Dust (IMPACT), University of Colorado, Boulder, Colorado 80303, USA.; Laboratory for Atmospheric and Space Physics (LASP), University of Colorado, Boulder, Colorado 80303, USA., Kvon V; ASML, Eindhoven, The Netherlands., Heijmans L; ASML, Eindhoven, The Netherlands., Chaudhuri M; ASML, Eindhoven, The Netherlands., van de Kerkhof M; ASML, Eindhoven, The Netherlands., Yakunin AM; ASML, Eindhoven, The Netherlands., Krainov P; ISTEQ B.V., High Tech Campus 9, 5656 AE Eindhoven, The Netherlands., Astakhov D; ISTEQ B.V., High Tech Campus 9, 5656 AE Eindhoven, The Netherlands.

Publikováno v: Physical review letters [Phys Rev Lett] 2024 Sep 13; Vol. 133 (11), pp. 115301.