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pro vyhledávání: '"Kousuke Tsubota"'
Autor:
Keiji Tsukada, Tomiharu Yamaguchi, Yohei Kondo, Toshihiko Kiwa, Tunetoshi Maehara, Hironobu Yamada, Hirofumi Imajo, Kousuke Tsubota, Tadayoshi Yamamoto, Tsutomu Hondo
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 129:278-282
An integrated sensor chip combining a heater for temperature control and a diode for temperature monitoring was fabricated and its characteristics evaluated. Furthermore, a new packaging structure with a gas permeable film and sensor chip attached to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::06c0ac5149442bed175574be464eb191
https://doi.org/10.1541/ieejsmas.129.278
https://doi.org/10.1541/ieejsmas.129.278
