Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Kotaro Mayumi"'
Autor:
Kotaro Mayumi, Takayuki Matsuno, Tetsushi Kamegawa, Ken’Ichi Morooka, Takao Hiraki, Yuichiro Toda
Publikováno v:
2022 International Symposium on Micro-NanoMehatronics and Human Science (MHS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::68729dda76f3997f94828cd1a7289d73
https://doi.org/10.1109/mhs56725.2022.10092168
https://doi.org/10.1109/mhs56725.2022.10092168
Autor:
Kotaro MAYUMI, Takayuki MATSUNO, Tetsushi KAMEGAWA, Takao HIRAKI, Yuichiro TODA, Mamoru MINAMI
Publikováno v:
The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec). 2021:1P3-C08
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66abe3f8bca05b8740606ff13dba0f0e
https://doi.org/10.1299/jsmermd.2021.1p3-c08
https://doi.org/10.1299/jsmermd.2021.1p3-c08
Publikováno v:
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).
Herein we report heterogeneous integration of vertically-aligned silicon (Si) microprobe arrays/(111) with MOSFET circuits/(100) by IC processes and subsequent selective vapor-liquid-solid (VLS) growth of silicon. A hybrid silicon-on-insulator (SOI)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::29edb12b18264eb49aeeba714ad65ab9
https://doi.org/10.1109/memsys.2010.5442489
https://doi.org/10.1109/memsys.2010.5442489