Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kory Goldammer"'
Publikováno v:
2017 ASEE Annual Conference & Exposition Proceedings.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c707ba43817d86dcf45d864a31857530
https://doi.org/10.18260/1-2--27715
https://doi.org/10.18260/1-2--27715
Autor:
Patrick M. Martin, Kory Goldammer, Chris Progler, Zhiziang Jin, Kurt Davis, Brian Dillon, Yuan Zhang, R. Scott Mackay, Sergei Bakarian, Karen Martirosyan, Rafik Marutyan, Gary Green, Young Ham, Hitendra Divecha, Victor V. Boksha, Mitch Heins
Publikováno v:
Design and Process Integration for Microelectronic Manufacturing III.
Mask manufacturing rules are usually determined from assumed or experimentally acquired mask-manufacturing limits. These rules are then applied during resolution enhancement data treatment to guide and/or limit pattern correction strategies. This tec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f3af55d70cd874d5ceca21d9c9f28340
https://doi.org/10.1117/12.600730
https://doi.org/10.1117/12.600730