Electron-beam fabrication of nonplanar templates for contact printing.

Autor: Rhee, K. W., Shirey, L. M., Isaacson, P. I., Kornegay, C. F., Dressick, W. J., Chen, M.-S., Brandow, S. L.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 6, p3569-3571, 3p