Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Konstantin Yu. Oblov"'
Autor:
Alexey A. Vasiliev, Anton V. Nisan, Gleb N. Potapov, Nikolay N. Samotaev, Konstantin Yu. Oblov, Anastasia V. Ivanova
Publikováno v:
Proceedings, Vol 1, Iss 4, p 324 (2017)
The application of thin LTCC is a very interesting and promising approach to the fabrication of ceramic MEMS gas sensors. The attempts to use this material were restricted till now by the thickness of commercial material (>50 μm). In this work, we f
Externí odkaz:
https://doaj.org/article/27913c71c77e47e5addcfe0b3e0f185b
Autor:
Andrey V. Kaziev, Dobrynya V. Kolodko, Vladislav Yu. Lisenkov, Alexander V. Tumarkin, Maksim M. Kharkov, Nikolay N. Samotaev, Konstantin Yu. Oblov
Publikováno v:
Coatings; Volume 13; Issue 2; Pages: 238
We examined the feasibility of alumina substrate metallization by magnetron deposition of copper coatings with thickness of several tens µm for its prospective applications in production of ceramic PCBs and packaging. The films were prepared in magn