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pro vyhledávání: '"Konstantin M. Erokhin"'
Publikováno v:
Applied Physics Letters. 66:3036-3038
We propose a method to dope silicon with phosphorus by means of the nuclear resonant reaction 30Si(p,γ)31P, which takes place when a natural silicon target is bombarded with a few MeV proton beam. This alternative method considerably reduces the usu