Zobrazeno 1 - 10
of 314
pro vyhledávání: '"Konishi, Toshifumi"'
Autor:
Yamane, Daisuke, Konishi, Toshifumi, Teranishi, Minami, Chang, Tso-Fu Mark, Chen, Chun-Yi, Toshiyoshi, Hiroshi, Masu, Kazuya, Sone, Masato, Machida, Katsuyuki
Publikováno v:
AMC 2015 – Advanced Metallization Conference
This paper reports the evaluation results of the mechanical structures of MEMS (micro electro mechanical systems) sensor implemented in the integrated MEMS inertial sensor for a wide sensing range from below 0.1 G to 20 G (1 G = 9.8 m/s^2). To invest
Autor:
Hashigata, Ken, Chang, Tso-Fu Mark, Tang, Haochun, Chen, Chun-Yi, Yamane, Daisuke, Konishi, Toshifumi, Ito, Hiroyuki, Machida, Katsuyuki, Masu, Kazuya, Sone, Masato
Publikováno v:
In Microelectronic Engineering 15 May 2019 213:13-17
Autor:
Tachibana, Koichiro, Chang, Tso-Fu Mark, Chen, Chun-Yi, Yamane, Daisuke, Konishi, Toshifumi, Ito, Hiroyuki, Machida, Katsuyuki, Masu, Kazuya, Sone, Masato
Publikováno v:
In Microelectronic Engineering 15 February 2019 207:33-36
Autor:
Tang, Haochun, Hashigata, Ken, Chang, Tso-Fu Mark, Chen, Chun-Yi, Nagoshi, Takashi, Yamane, Daisuke, Konishi, Toshifumi, Machida, Katsuyuki, Masu, Kazuya, Sone, Masato
Publikováno v:
In Surface & Coatings Technology 25 September 2018 350:1065-1070
Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications
Autor:
Asano, Keisuke, Tang, Haochun, Chen, Chun-Yi, Nagoshi, Takashi, Chang, Tso-Fu Mark, Yamane, Daisuke, Konishi, Toshifumi, Machida, Katsuyuki, Masu, Kazuya, Sone, Masato
Publikováno v:
In Microelectronic Engineering 5 September 2018 196:20-24
Enhancement in structure stability of gold micro-cantilever by constrained fixed-end in MEMS devices
Autor:
Teranishi, Minami, Chen, Chun-Yi, Chang, Tso-Fu Mark, Konishi, Toshifumi, Yamane, Daisuke, Machida, Katsuyuki, Masu, Kazuya, Sone, Masato
Publikováno v:
In Microelectronic Engineering 5 February 2018 187-188:105-109
Autor:
Shibata, Kohei, Uchiyama, Akihiro, Onishi, Akira, Machida, Katsuyuki, CHAKRABORTY, P, CHAKRABORTY, Parthojit, Iida, Shinichi, Konishi, Toshifumi, Sone, Masato, Miyake, Yoshihiro, Ito, Hiroyuki
Publikováno v:
IEEE Sensors Journal. 22:14769-14778
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b7b31bfa671f0d7fe0e57e880cc07fbc
https://doi.org/10.1109/jsen.2022.3184340
https://doi.org/10.1109/jsen.2022.3184340
Autor:
Yamane, Daisuke, Konishi, Toshifumi, Safu, Teruaki, Toshiyoshi, Hiroshi, Sone, Masato, Masu, Kazuya, Machida, Katsuyuki
Publikováno v:
In Microelectronics Reliability November 2016 66:78-84
Autor:
Teranishi, Minami, Chang, Tso-Fu Mark, Chen, Chun-Yi, Konishi, Toshifumi, Machida, Katsuyuki, Toshiyoshi, Hiroshi, Yamane, Daisuke, Masu, Kazuya, Sone, Masato
Publikováno v:
In Microelectronic Engineering 15 June 2016 159:90-93
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