Experience in the Development of a Configurable Laboratory UV Projection Photolithography System of Micron Resolution.

Autor: Prokopovich, P. A., Frolov, D. N., Frolov, V. N., Klement’ev, E. S., Grunin, A. I., Dikaya, O. A., Koneva, U. Yu., Lyahov, G. G., Efimov, D. D., Serebrennikov, D. A., Molchanov, V. V., Severin, E. A., Toropova, O. V., Goikhman, A. Yu.

Publikováno v: Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques; Jul2018, Vol. 12 Issue 4, p744-755, 12p