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We report on a giant enhancement in the thermal responsivity of the doubly-clamped GaAs microelectromechanical (MEMS) beam resonators by using the internal mode coupling effect. This is achieved by coupling the fundamental bending mode with the funda
Externí odkaz:
http://arxiv.org/abs/2003.10119
Autor:
Nakaoka, Toshihirio, Furuse, Yuki, Kondo, Ryoka, Nonaka, Nao, Yabuta, Naoto, Utsumi, Jun, Kishikawa, Ryoko, Shohmitsu, Yoshinori, Kawasaki, Shigeo
Publikováno v:
第18回宇宙科学シンポジウム 講演集 = Proceedings of the 18th Space Science Symposium.
第18回宇宙科学シンポジウム (2018年1月9日-10日. 宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)相模原キャンパス), 相模原市, 神奈川県
18th Space Science Symposium (January 9-10, 2018. Institute of Sp
18th Space Science Symposium (January 9-10, 2018. Institute of Sp