Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kolybelkin, V."'
Features of Electronic Emission from Surface of Dielectric Thin-film Materials with Ion-beam Etching
Publikováno v:
Scopus-Elsevier
This work presents a series of experimental studies aimed at validating the main theoretical aspects of the ion-electron emission in conditions of ion-beam etching and lookup the possibility of practical realiza-tion of the method of operative contro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::609acb5df87aee4d4a8eeed611995008
http://essuir.sumdu.edu.ua/handle/123456789/36276
http://essuir.sumdu.edu.ua/handle/123456789/36276
Autor:
Kurochka, A., Sergienko, A., Kurochka, S., Kolybelkin, V., Emelyanov, S. G., Egor Yakushko, Chervjakov, L. M.
Publikováno v:
Scopus-Elsevier
The results of the research value of the current of the secondary electrons in the ion-beam etching of various semiconductors. Shows the setup and electrical circuit of the experiment. An experimental study to determine the dependence of the current
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::23e9e18098c9f14e786fd47c08263ee4
http://essuir.sumdu.edu.ua/handle/123456789/33663
http://essuir.sumdu.edu.ua/handle/123456789/33663