Zobrazeno 1 - 10
of 36
pro vyhledávání: '"Kolari, Kai"'
Autor:
Kolari, Kai.
Thesis (doctoral)--Helsinki University of Technology, 2007.
Includes bibliographical references. Also available on the World Wide Web.
Includes bibliographical references. Also available on the World Wide Web.
Externí odkaz:
http://www.vtt.fi/inf/pdf/publications/2007/P670.pdf
Autor:
Saftics, András, Agócs, Emil, Fodor, Bálint, Patkó, Dániel, Petrik, Péter, Kolari, Kai, Aalto, Timo, Fürjes, Péter, Horvath, Robert, Kurunczi, Sándor
Publikováno v:
In Applied Surface Science 15 September 2013 281:66-72
Autor:
Haapala, Markus, Saarela, Ville, Pól, Jaroslav, Kolari, Kai, Kotiaho, Tapio, Franssila, Sami, Kostiainen, Risto
Publikováno v:
In Analytica Chimica Acta 2010 662(2):163-169
Publikováno v:
In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:417-446
Publikováno v:
In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:444-469
Autor:
Aalto, Timo, Airaksinen, Veli-Matti, Albert, Stephan Gerhard, Allegato, Giorgio, Amiotti, Marco, Anttila, Olli, Auersperg, Juergen, Bonucci, Antonio, Bose, Indranil Ronnie, Braun, Tanja, Broas, Mikael, Burggraf, J., Cameron, Christopher, Candler, Rob N., Cao, Zhen, Cardoso, André, Chen, Kuo-Shen, Conte, Andrea, Cozma, Adriana, Davis, Cristina E., Dempwolf, Sophia, Dixit, Pradeep, Dost, Michael, Dragoi, Viorel, Eränen, Simo, Fain, Bruno, Figeys, B., Fischer, Andreas C., Flötgen, Christoph, Franssila, Sami, Friedberger, Alois, Fueldner, Marc, Ganchenkova, Maria, Gonzalez, Pilar, Gosálvez, Miguel A., Grimes, Michael, Haapalinna, Atte, Hagelin, Paul, Hammond, Paul, Henttinen, Kimmo, Henttonen, Vesa, Horsley, David, Hoshi, Takeo, Itoh, Satoshi, Jakobsen, Henrik, Jansen, R., Jonsson, Kerstin, Kähler, Dirk, Kannojia, Harindra Kumar, Kattelus, Hannu, Kissinger, Gudrun, Knechtel, Roy, Knese, Kathrin, Kolari, Kai, Koskenvuori, Mika, Kuisma, Heikki, Kulkarni, Amit, Laermer, Franz, Landesberger, Christof, Leinenbach, Christina, LeVasseur, Michael K., Li, Jue, Lin, Yuyuan, Lindner, Paul F., Lodewijks, K., Lofink, Fabian, Longoni, Giorgio, Luber, Sebastian Markus, Mahmud-ul-hasan, M., Mäkinen, Jari, Mäntysalo, Matti, Martin, Devin, Maspero, Federico, Mattila, Toni T., Mauri, Luca, Merz, Peter, Meyer, Doug, Moraja, Marco, Motooka, Teruaki, Müller, Gerhard, Muralt, Paul, Nieminen, Risto M., Niklaus, Frank, Oggioni, Laura, Olkkonen, Juuso, Österlund, Elmeri, Ou, Kuang-Shun, Paloheimo, Jari, Pasanen, Toni P., Paulasto-Kröckel, Mervi, Plach, Thomas, Polizzi, Jean-Philippe, Pressel, Klaus, Putkonen, Matti, Puurunen, Riikka L., Reinert, Wolfgang, Rizzi, Enea, Rochus, V., Ross, Glenn, Rottenberg, X., Sainiemi, Lauri, Savin, Hele, Schenk, Harald, Schikowski, Marc, Schulze, Matthias, Seema, S., Severi, S., Skogström, Lasse, Suga, Tadatomo, Sullivan, Scott, Suni, Tommi, Theuss, Horst, Tilli, Markku, Tilmans, H.A.C., Tittonen, Ilkka, Tofteberg, Hannah, Törmä, Pekka, Tuomikoski, Santeri, Tyholdt, Frode, Uda, Tsuyoshi, Vallin, Örjan, Valzasina, Carlo, Veijola, Timo, Viinikka, Eeva, Vogel, Dietmar, Vogl, Andreas, Vuorinen, Vesa, Westervelde, W.J., Wicht, Sebastian, Wieland, Robert, Winkler, Bernhard, Yobas, Levent, Zanotti, Luca, Zubel, I.
Publikováno v:
In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:xv-xvii
Publikováno v:
Kolari, K, Havia, T, Stuns, I & Hjort, K 2013, ' Optically driven microfluid flow controller based on thermal expansion ', 24th Micromechanics and Microsystems Europe, Espoo, Finland, 1/09/13-4/09/13 pp. P45 .
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=355e65625b88::86ceca90a125d5db26653eab9e54df0c
https://cris.vtt.fi/en/publications/e8c1e71d-2dea-42ef-8d88-fec529d6e86f
https://cris.vtt.fi/en/publications/e8c1e71d-2dea-42ef-8d88-fec529d6e86f
Autor:
Petrik, P., Egger, H., Eiden, S., Agocs, E., Fried, M., Pecz, B., Kolari, Kai, Aalto, Timo, Horvath, R., Giannone, D
Publikováno v:
Petrik, P, Egger, H, Eiden, S, Agocs, E, Fried, M, Pecz, B, Kolari, K, Aalto, T, Horvath, R & Giannone, D 2012, Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors . in Symposium GG : Titanium Dioxide Nanomaterials . Materials Research Society, Materials Research Society Symposia Proceedings, vol. 1352, pp. 81-87, 2011 MRS Spring Meeting, San Francisco, CA, United States, 25/04/12 . https://doi.org/10.1557/opl.2011.1342
Creating optical quality thin films with a high refractive index is increasingly important for waveguide sensor applications. In this study, we present optical models to measure the layer thickness, vertical and lateral homogeneity, the refractive in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=355e65625b88::3256158a9e6a9b6b064fd05a8c444292
https://cris.vtt.fi/en/publications/d7770e9e-040e-42b6-9aee-66fe10bc1efd
https://cris.vtt.fi/en/publications/d7770e9e-040e-42b6-9aee-66fe10bc1efd
Publikováno v:
Kolari, K, Haatainen, T, Ylinen, S & Aalto, T 2011, Nanoimprinting polyimide and polymer multilayers . in Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop . Vestfold University College, pp. 73-76, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19-22 June 2011, 1/01/11 .
This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=355e65625b88::786e224ea9ed795430d1d1fd23c6ebd9
https://cris.vtt.fi/en/publications/a50ce0e0-e411-4f06-96df-fd832b888832
https://cris.vtt.fi/en/publications/a50ce0e0-e411-4f06-96df-fd832b888832
Publikováno v:
Kolari, K, Vehmas, T & Aalto, T 2009, ' Smoothing of as-etched silicon surface by thermal annealing in argon atmosphere ', Physics Days-Fysiikan päivät 2009, Espoo, Finland, 12/03/09-14/03/09 . < http://ltl.tkk.fi/~ttheikki/physday09abs/1038.pdf >
Reordering of silicon surface as a result of annealing in high temperature environment has gained interest recently. Annealing in pure hydrogen and preferably in reduced pressure has been studied for more than a decade to reduce the surface roughness
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=355e65625b88::c2963c535f85cac06509dbb1c7a6a0df
https://cris.vtt.fi/en/publications/ace71116-f39e-4f58-8514-b7b3e8213d2c
https://cris.vtt.fi/en/publications/ace71116-f39e-4f58-8514-b7b3e8213d2c