Výsledky vyhledávání - "Koki Akita"

Removal of Novolac Photoresist with Various Concentrations of Photo-active Compound Using H2/O2 Mixtures Activated on a Tungsten Hot-wire Catalyst

Autor: Masashi Yamamoto, Shota Sogo, Koki Akita, Hideo Horibe, Ryusei Sogame, Shiro Nagaoka, Hironobu Umemoto

Publikováno v: Journal of Photopolymer Science and Technology. 34:499-504

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c83874cb95a8dc2270445e8c288c3357
https://doi.org/10.2494/photopolymer.34.499

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Evaluation of Decomposition Property of Photoresist by Oxygen Radicals Using Helium-Oxygen Mixtures

Autor: Koki Akita, Shiro Nagaoka, Masashi Yamamoto, Hideo Horibe, Hironobu Umemoto

Publikováno v: Journal of Photopolymer Science and Technology. 33:433-437

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e10a93f7f2b2a15ede9afa6b6471823b
https://doi.org/10.2494/photopolymer.33.433

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Effects of Nitrogen Dilution on the Photoresist Removal Rate by Hydrogen Radicals

Autor: Shiro Nagaoka, Masashi Yamamoto, Koki Akita, Hiroto Nishioka, Hironobu Umemoto, Hideo Horibe

Publikováno v: Journal of Photopolymer Science and Technology. 33:427-431

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::4c4ad04a8866b181cf297e9d85b3fd9e
https://doi.org/10.2494/photopolymer.33.427

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