Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Koji Ihibashi"'
Publikováno v:
Japanese Journal of Applied Physics. 47:1978-1981
A low-pressure chemical vapor deposition (CVD) system with in situ catalyst deposition capability has been fabricated to grow single-wall carbon nanotubes (SWNTs) in a controlled manner. To clarify the unique of the low-pressure CVD technique, the ef