Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Koitzsch, Matthias"'
Autor:
Lewke, Dirk, Koitzsch, Matthias, Schellenberger, Martin, Pfitzner, Lothar, Ryssel, Heiner, Zühlke, Hans-Ulrich
The novel Thermal Laser Separation (TLS) technology allows for kerf-free dicing of brittle materials by crack guiding through thermally induced mechanical stress. Several benefits like a zero kerf and a high edge quality make it a promising technolog
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od_______610::ec1610e7ef16e744992f986ba9637e17
https://publica.fraunhofer.de/handle/publica/230544
https://publica.fraunhofer.de/handle/publica/230544
Autor:
Koitzsch, Matthias, Honold, Alfred
This paper presents the evaluation of economic effects due to the implementation of virtual metrology (VM) algorithms into the IT infrastructure of IC manufacturers factories, providing the basis for assessing the investment into VM. The basic assump
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::36bcacbb4da045040798bc8bb68de701
Autor:
Lewke, Dirk, Koitzsch, Matthias, Dohnke, Karl Otto, Schellenberger, Martin, Zuehlke, Hans-Ulrich, Rupp, Roland, Pfitzner, Lothar, Ryssel, Heiner
Publikováno v:
MRS Online Proceedings Library; 2014, Vol. 1693 Issue 1, p55-60, 6p
Publikováno v:
ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference; 2013, p400-403, 4p