Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Koichi Oguchi"'
Autor:
Myungho Lim, Koji Ohashi, Carlos A. Paz de Araujo, Vikram Joshi, Koichi Oguchi, Eiji Natori, Junichi Karasawa, Jolanta Celinska, Nararyan Solayappan, Tatsuya Shimoda, Yasuaki Hamada, Larry D. McMillan
Publikováno v:
Integrated Ferroelectrics. 48:193-202
In order to reduce the thermal budget for SBT crystallization process in planer type stack cell FeRAMs, Rapid Thermal Anneal (RTA) based process for SBT thin film was investigated. Our new process is characterized by crystallization in RTA without an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::20cb5b5b085eb652ffd72c7fcd3c50bb
https://doi.org/10.1080/10584580215452
https://doi.org/10.1080/10584580215452
Autor:
Koji Ohashi, Junichi Karasawa, Koichi Oguchi, Tatsuya Shimoda, Carlos A. Paz de Araujo, Eiji Natori, Larry D. McMillan, Yasuaki Hamada, Vikram Joshi
Publikováno v:
Integrated Ferroelectrics. 39:199-214
Various attempts to improve the microstructure of SBT thin films were carried out. One was to employ ultra-thin BT film as a top layer on the conventional SBT thin film. After optimization of the BT top layer thickness, a very smooth SBT surface was
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::43b43f8037ba959b65e17b88f13a2f7f
https://doi.org/10.1080/10584580108011943
https://doi.org/10.1080/10584580108011943