Defect formation upon reactive direct-current magnetron sputtering of GeO2 films.

Autor: Njoroge, Walter, Lange, Thomas, Weis, Hansjörg, Kohnen, Birgit, Wuttig, Matthias

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2000, Vol. 18 Issue 1, p42-47, 6p