Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Kohgi Kato"'
Autor:
Satoru Iizuka, Kohgi Kato
Publikováno v:
International Journal of Engineering Research and Applications. :41-47
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9e2fa6bc751c6e4f7c1a1a534e3f1465
https://doi.org/10.9790/9622-0702024147
https://doi.org/10.9790/9622-0702024147
Publikováno v:
Journal of Scientific Research and Reports. 11:1-9
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ce63fa8b6f01defef896eb6769f7a5ca
https://doi.org/10.9734/jsrr/2016/26362
https://doi.org/10.9734/jsrr/2016/26362
Autor:
Satoru Iizuka, Kohgi Kato
Publikováno v:
Journal of Applied Mathematics and Physics. :1811-1836
A simple method for measuring RF plasma parameters by means of a DC-biased Langmuir probe is developed. The object of this paper is to ensure the reliability of this method by using the other methods with different principles. First, Langmuir probe c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cebb81f48aaa10105d8fe8ad4c5d067a
https://doi.org/10.4236/jamp.2016.49185
https://doi.org/10.4236/jamp.2016.49185
Publikováno v:
Japanese Journal of Applied Physics. 47:8565-8569
The basic characteristics of control of electron temperature in weakly ionized plasma have been investigated in the absence of magnetic field using a grid-bias method. To control the electron temperature, dc voltage is applied to a mesh grid covered
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::183a472877911f339807a5e323b99f85
https://doi.org/10.1143/jjap.47.8565
https://doi.org/10.1143/jjap.47.8565
Publikováno v:
Thin Solid Films. 515:4094-4097
We discuss theoretically how the resistance of a film deposited on the metal grid affects the efficiency of electron-temperature control by employing a grid-bias method, in which, by using a naked metal grid, the electron temperature decreases from 3
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d025a7ffc180923e0dd65e3a27052882
https://doi.org/10.1016/j.tsf.2006.02.049
https://doi.org/10.1016/j.tsf.2006.02.049
Publikováno v:
Thin Solid Films. 515:4182-4186
We developed a noble technique for the fine-particle handling in plasmas. In this method a pair of point electrodes are introduced in the plasma, to which positive pulses are applied alternatively. When the pulse repetition period is shorter than the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::facb4f62da05f0d5abe5151681b2ad11
https://doi.org/10.1016/j.tsf.2006.02.052
https://doi.org/10.1016/j.tsf.2006.02.052
Publikováno v:
Thin Solid Films. :73-76
Nanocrystalline diamond deposition is investigated under a control of electron temperature in CH4/H2/Ar plasma produced by inductively coupled rf discharge. A grid-biasing method is employed for the control of electron temperature Te. When Te in the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5a446d91fa104d69fd6bef1968b605d9
https://doi.org/10.1016/j.tsf.2005.08.085
https://doi.org/10.1016/j.tsf.2005.08.085
Publikováno v:
Thin Solid Films. 457:55-58
A noble method for the production of high density and low electron temperature plasma is presented. In plasma enhanced chemical vapor depositions, electron temperature affects the quality of deposited films, so a low-electron-temperature plasma is re
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::086bc7e4e1e66b3e7415d04140b44d03
https://doi.org/10.1016/j.tsf.2003.12.013
https://doi.org/10.1016/j.tsf.2003.12.013
Publikováno v:
Plasma Sources Science and Technology. 12:S21-S25
We report a new method for the nucleation and growth of diamonds by employing an electron-temperature control technique in CH4/H2 radio frequency glow discharge plasma under a low gas pressure of 100 mTorr. The electron temperature in the plasma is c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d0c0eceb24af5be7685fbc08c15a60b0
https://doi.org/10.1088/0963-0252/12/4/316
https://doi.org/10.1088/0963-0252/12/4/316
Publikováno v:
Applied Physics Letters. 76:547-549
Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::257a2537cc0650f88eb5928501b43937
https://doi.org/10.1063/1.125814
https://doi.org/10.1063/1.125814