Zobrazeno 1 - 10
of 21
pro vyhledávání: '"Kohei Ogiwara"'
Autor:
Ting Kuei Lien, Kohei Ogiwara, Kuo Feng Chiu, Kuan Chen Chen, Yoshinobu Kawai, Kiichiro Uchino, Cheng Yang Lien, Masaaki Tanaka, Yu Jer Tsai, Fumihiko Matsunaga, Chia-Fu Chen
Publikováno v:
Plasma Processes and Polymers. 13:584-587
A capacitively coupled VHF H2 plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d78ce22da026cbb405c691d90c0f3577
https://doi.org/10.1002/ppap.201500183
https://doi.org/10.1002/ppap.201500183
Publikováno v:
Thin Solid Films. 547:132-136
The effects of a balanced power feeding (BPF) method on a very high frequency hydrogen plasma produced with narrow-gap parallel plate electrodes are studied by 2-dimensional simulation. It was found that the electron density increases inside the elec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28f59add8fd0e7c9f2bc5e409b06f262
https://doi.org/10.1016/j.tsf.2013.04.054
https://doi.org/10.1016/j.tsf.2013.04.054
Autor:
Masayoshi Tanaka, M. Hattori, Atsushi Okamoto, Mitsutoshi Aramaki, Kohei Ogiwara, Kenichiro Terasaka, Shinji Yoshimura
Publikováno v:
Physics of Plasmas 23, 112120 (2016); https://doi.org/10.1063/1.4968217
A neutral depletion structure with strong inhomogeneity in the radial direction has been observed in an electron cyclotron resonance plasma. We have measured the velocity distribution function of neutrals with a high resolution laser-induced fluoresc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::37e69a6aac918006b0601a82ec84a82c
http://hdl.handle.net/10655/00012760
http://hdl.handle.net/10655/00012760
Publikováno v:
Japanese Journal of Applied Physics. 56:01AC05
The spatial profiles of a VHF H2 plasma (60 MHz) for different discharge gap distances were examined at pressures of 66.7 and 133.3 Pa by two-dimensional simulations using the plasma hybrid code. The electron density had a peak profile, and the maxim
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::85e6aa6ba2d63fc78d77dae08e7efedd
https://doi.org/10.7567/jjap.56.01ac05
https://doi.org/10.7567/jjap.56.01ac05
Publikováno v:
Japanese Journal of Applied Physics. 55:07LD01
A two-dimensional simulation on a VHF H2 plasma (60 MHz) was performed using the plasma hybrid code, and plasma parameters were examined as a function of pressure for different discharge gaps. It was found that as the pressure increased, the H3 + and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::75696523147ac3d1e704eb61301d3871
https://doi.org/10.7567/jjap.55.07ld01
https://doi.org/10.7567/jjap.55.07ld01
Autor:
Yoshinobu Kawai, Yu Jer Tsai, Kuo Feng Chiu, Kiichiro Uchino, Ting Kuei Lien, Kuan Chen Chen, Chia-Fu Chen, Cheng Yang Lien, Kohei Ogiwara
Publikováno v:
Japanese Journal of Applied Physics. 55:06HA02
A VHF H2 plasma was produced by a narrow-gap discharge at high pressures, and the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode at a discharge gap of 10 mm, wh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1a717c61d0a8d906095442f885378d51
https://doi.org/10.7567/jjap.55.06ha02
https://doi.org/10.7567/jjap.55.06ha02
Autor:
Kohei Ogiwara, Cheng Yang Lien, Chia-Fu Chen, Kiichiro Uchino, Yoshinobu Kawai, Yu Jer Tsai, Jen-Bin Shi, Ting Kuei Lien, Kuan Chen Chen, Kuo Feng Chiu
Publikováno v:
Japanese Journal of Applied Physics. 55:01AH01
A capacitively coupled VHF H2 plasma was produced with a conventional parallel plate electrode of 400 × 300 mm2. Axial distributions of the plasma parameters were examined using a movable Langmuir probe. The electron density had a hill-like profile
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::107bf9a3cccae3642bdaf306ed1986a3
https://doi.org/10.7567/jjap.55.01ah01
https://doi.org/10.7567/jjap.55.01ah01
Publikováno v:
IEEE Transactions on Plasma Science. 39:2470-2471
The ion flow structure in a diverging magnetic field is measured in a steady-state electron cyclotron resonance plasma. It has been observed that stream line detachment takes place when the nonadiabaticity parameter of ions becomes the order of unity
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::87bb43f2324e6e05373f01bc658de674
https://doi.org/10.1109/tps.2011.2113194
https://doi.org/10.1109/tps.2011.2113194
Publikováno v:
Japanese Journal of Applied Physics. 54:01AC04
The characteristics of a balanced power feeding VHF plasma was examined by two-dimensional simulation in which a pair of parallel disc discharge electrodes was surrounded by a metal box. The simulation results indicated that charged particles were ge
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b3e9992efa7bbf4c9e38db7ed02feb4
https://doi.org/10.7567/jjap.54.01ac04
https://doi.org/10.7567/jjap.54.01ac04
Publikováno v:
Japanese Journal of Applied Physics. 52:11ND01
The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined by using a two-dimensional Monte Carlo fluid hybrid model. The simulation results showed that the electron density is maximum at a certain pressure
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::274379aa32f52dfc3cce0da2fb3c56d0
https://doi.org/10.7567/jjap.52.11nd01
https://doi.org/10.7567/jjap.52.11nd01