Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Knollenberg, Brian A."'
Publikováno v:
In Handbook of Silicon Wafer Cleaning Technology Edition: Third Edition. 2018:659-699
Detection and classification of defects generated during the integrated circuit fabrication steps are of critical importance to both attaining and maintaining a high-yielding manufacturing process, which will enable the production of superior devices
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::802eb848d39e31cd5f878bbc1f643dea
https://doi.org/10.1016/b978-0-323-51084-4.00012-5
https://doi.org/10.1016/b978-0-323-51084-4.00012-5
Autor:
Bakhtari, Kaveh, Bearda, Twan, Beaudoin, Stephen P., Bigman, Joel L., Brown, Brian, Busnaina, Ahmed, Chabal, Yves J., Chen, Yufei, Cui, Hua, Florescu, Doru, Gale, Glenn W., Hess, Dennis W., Hues, Steven M., Kern, Werner, Knollenberg, Brian A., Lauerhaas, Jeffrey M., Lovejoy, Luke, Mertens, Paul W., Mikhaylichenko, Katrina, Muscat, Anthony J., Paluvai, Nagarjuna R., Park, Jin-Goo, Redeker, Fritz, Reidy, Richard F., Reinhardt, Karen A., Rodier, Daniel R., Rotondaro, Antonio L.P., Rupich, Sara M., Venkatesh, R. Prasanna
Publikováno v:
In Handbook of Silicon Wafer Cleaning Technology Edition: Third Edition. 2018:xi-xi