Full characterization of ultrathin 5-nm low- k dielectric bilayers: Influence of dopants and surfaces on the mechanical properties

Autor: Frazer, TD, Knobloch, JL, Hernández-Charpak, JN, Hoogeboom-Pot, KM, Nardi, D, Yazdi, S, Chao, W, Anderson, EH, Tripp, MK, King, SW, Kapteyn, HC, Murnane, MM, Abad, B

Publikováno v: Physical Review Materials, vol 4, iss 7

Ultrathin films and multilayers, with controlled thickness down to single atomic layers, are critical for advanced technologies ranging from nanoelectronics to spintronics to quantum devices. However, for thicknesses less than 10 nm, surfaces and dop

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______325::9e005a1130fb8cfbc5591b470f854a25
https://escholarship.org/uc/item/8zs5k49w

Structural and Elastic Properties of Empty-Pore Metalattices Extracted via Nondestructive Coherent Extreme UV Scatterometry and Electron Tomography.

Autor: Knobloch JL; Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States., McBennett B; Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States., Bevis CS; Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States., Yazdi S; Renewable and Sustainable Energy Institute and the Materials Science & Engineering Program, University of Colorado, Boulder, Colorado 80309, United States., Frazer TD; Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States., Adak A; Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States., Nelson EE; Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States., Hernández-Charpak JN; Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States., Cheng HY; Department of Chemistry and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Grede AJ; Department of Chemistry and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Mahale P; Department of Chemistry, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States., Nova NN; Department of Chemistry and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Giebink NC; Department of Chemistry and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Mallouk TE; Department of Chemistry, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States., Badding JV; Department of Chemistry and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States., Kapteyn HC; Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States.; KMLabs Incorporated, 4775 Walnut Street, Building 102, Boulder, Colorado 80301, United States., Abad B; Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States., Murnane MM; Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States.

Publikováno v: ACS applied materials & interfaces [ACS Appl Mater Interfaces] 2022 Sep 14; Vol. 14 (36), pp. 41316-41327. Date of Electronic Publication: 2022 Sep 02.

Directional thermal channeling: A phenomenon triggered by tight packing of heat sources.

Autor: Honarvar H; JILA, University of Colorado, Boulder, CO 80309.; STROBE NSF Science and Technology Center, University of Colorado, Boulder, CO 80309.; Department of Physics, University of Colorado, Boulder, CO 80309.; Ann and H. J. Smead Department of Aerospace Engineering Sciences, University of Colorado, Boulder, CO 80309., Knobloch JL; JILA, University of Colorado, Boulder, CO 80309.; STROBE NSF Science and Technology Center, University of Colorado, Boulder, CO 80309.; Department of Physics, University of Colorado, Boulder, CO 80309., Frazer TD; JILA, University of Colorado, Boulder, CO 80309.; STROBE NSF Science and Technology Center, University of Colorado, Boulder, CO 80309.; Department of Physics, University of Colorado, Boulder, CO 80309., Abad B; JILA, University of Colorado, Boulder, CO 80309.; STROBE NSF Science and Technology Center, University of Colorado, Boulder, CO 80309.; Department of Physics, University of Colorado, Boulder, CO 80309., McBennett B; JILA, University of Colorado, Boulder, CO 80309.; STROBE NSF Science and Technology Center, University of Colorado, Boulder, CO 80309.; Department of Physics, University of Colorado, Boulder, CO 80309., Hussein MI; Department of Physics, University of Colorado, Boulder, CO 80309; Margaret.Murnane@colorado.edu mih@colorado.edu.; Ann and H. J. Smead Department of Aerospace Engineering Sciences, University of Colorado, Boulder, CO 80309., Kapteyn HC; JILA, University of Colorado, Boulder, CO 80309.; STROBE NSF Science and Technology Center, University of Colorado, Boulder, CO 80309.; Department of Physics, University of Colorado, Boulder, CO 80309., Murnane MM; JILA, University of Colorado, Boulder, CO 80309; Margaret.Murnane@colorado.edu mih@colorado.edu.; STROBE NSF Science and Technology Center, University of Colorado, Boulder, CO 80309.; Department of Physics, University of Colorado, Boulder, CO 80309., Hernandez-Charpak JN; JILA, University of Colorado, Boulder, CO 80309.; STROBE NSF Science and Technology Center, University of Colorado, Boulder, CO 80309.; Department of Physics, University of Colorado, Boulder, CO 80309.

Publikováno v: Proceedings of the National Academy of Sciences of the United States of America [Proc Natl Acad Sci U S A] 2021 Oct 05; Vol. 118 (40).

Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry.

Autor: Tanksalvala M; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA. michael.tanksalvala@colorado.edu yuka.esashi@colorado.edu., Porter CL; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Esashi Y; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA. michael.tanksalvala@colorado.edu yuka.esashi@colorado.edu., Wang B; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Jenkins NW; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Zhang Z; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Miley GP; Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA., Knobloch JL; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., McBennett B; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Horiguchi N; Imec, Kapeldreef 75, 3001 Leuven, Belgium., Yazdi S; Renewable and Sustainable Energy Institute (RASEI), University of Colorado, Boulder, CO 80309, USA., Zhou J; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.; Department of Physics and Astronomy and California NanoSystem Institute, University of California, Los Angeles, CA 90095, USA., Jacobs MN; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Bevis CS; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Karl RM Jr; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Johnsen P; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Ren D; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.; Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, USA., Waller L; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.; Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, USA., Adams DE; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Cousin SL; KMLabs Inc., 4775 Walnut St. #102, Boulder, CO 80301, USA., Liao CT; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Miao J; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.; Department of Physics and Astronomy and California NanoSystem Institute, University of California, Los Angeles, CA 90095, USA., Gerrity M; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA., Kapteyn HC; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.; KMLabs Inc., 4775 Walnut St. #102, Boulder, CO 80301, USA., Murnane MM; STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.

Publikováno v: Science advances [Sci Adv] 2021 Jan 27; Vol. 7 (5). Date of Electronic Publication: 2021 Jan 27 (Print Publication: 2021).

Full-field imaging of thermal and acoustic dynamics in an individual nanostructure using tabletop high harmonic beams.

Autor: Karl RM Jr; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Mancini GF; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Knobloch JL; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Frazer TD; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Hernandez-Charpak JN; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Abad B; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Gardner DF; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Shanblatt ER; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Tanksalvala M; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Porter CL; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Bevis CS; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Adams DE; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Kapteyn HC; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA., Murnane MM; JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA.

Publikováno v: Science advances [Sci Adv] 2018 Oct 19; Vol. 4 (10), pp. eaau4295. Date of Electronic Publication: 2018 Oct 19 (Print Publication: 2018).