Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Kiyoyuki Kabuki"'
Autor:
Tomonao Hosokai, Hiroto Sato, Takahiro Shirai, Shinsuke Mouri, Daiki Yamatani, Kiyoyuki Kabuki, Kazuaki Hotta, Yuki Joshima, Takahiro Inoue, Koji Miyauchi, Takuma Yokoyama, Yusuke Teramoto, Toshio Yokota, Gohta Niimi, Hiroshi Mizokoshi, Tetsu Takemura, Kohkan C. Paul, Hironobu Yabuta, Kazunori Bessho, Zenzo Narihiro
Publikováno v:
SPIE Proceedings.
Discharge-produced plasma (DPP)-based EUV source is being developed at Gotenba Branch of EUVA Hiratsuka RDsr within 2 % bandwidth around 13.5 nm. Using a nested grazing-incidence collector, EUV power at the intermediate focus which is defined as an i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c44ba42a2415248987979b45f7cede49
https://doi.org/10.1117/12.728711
https://doi.org/10.1117/12.728711
Autor:
Takahiro Shirai, Daiki Yamatani, Khokan C. Paul, Kazunori Bessho, Yuki Joshima, Kazuaki Hotta, Hironobu Yabuta, Hiroto Sato, Koji Miyauchi, Yusuke Teramoto, Mitsuru Ikeuchi, Tetsu Takemura, Kiyoyuki Kabuki, Gohta Niimi, Masaki Yoshioka, Toshio Yokota
Publikováno v:
SPIE Proceedings.
Discharge-produced plasma (DPP) based EUV source is being developed at Gotenba Branch of EUVA Hiratsuka R&D Center. Among the several kinds of discharge scheme, Z-pinch is employed in our source. An all-solid-state magnetic pulse compression (MPC) ge
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::340f18dd5dcd70ad9b1e48fce4661377
https://doi.org/10.1117/12.657272
https://doi.org/10.1117/12.657272
Autor:
Tetsu Takemura, Kazunori Bessho, Kazuaki Hotta, Koji Miyauchi, Toshio Yokota, Khokan C. Paul, Mitsuru Ikeuchi, Yusuke Teramoto, Kiyoyuki Kabuki, Gohta Niimi, Masaki Yoshioka, Hiroto Sato, Takahiro Shirai, Daiki Yamatani, Koichi Toyoda
Publikováno v:
SPIE Proceedings.
Discharge-produced plasma (DPP) based EUV source have been studied and developed at EUVA/Gotenba Branch. Among the several kinds of discharge scheme, a capillary Z-pinch has been employed in our source. An all-solid-state magnetic pulse compression (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4472e73291d3136f12b7b84d0f4a0c4a
https://doi.org/10.1117/12.602021
https://doi.org/10.1117/12.602021
Autor:
Kazunori Bessho, Kazuaki Hotta, Mitsuru Ikeuchi, Koichi Toyoda, Kohkan C. Paul, Masaki Yoshioka, Hiroto Sato, Yusuke Teramoto, Keisuke Okubo, Tetsu Takemura, Kiyoyuki Kabuki, Takahiro Shirai, Daiki Yamatani, Koji Miyauchi, Toshio Yokota
Publikováno v:
SPIE Proceedings.
Discharge-produced plasma (DPP) based EUV source have been studied and developed at EUVA/Gotenba Branch. Among the several kinds of discharge scheme, a capillary Z-pinch has been employed in our source. An all-solid-state magnetic pulse compression (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::de587c7fe69dcef05d1c23e0645ba617
https://doi.org/10.1117/12.536036
https://doi.org/10.1117/12.536036