Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Kiyotoshi Fujii"'
Publikováno v:
IEEJ Transactions on Fundamentals and Materials. 133:572-577
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::19b2c60233ad0850b69e9584d0671009
https://doi.org/10.1541/ieejfms.133.572
https://doi.org/10.1541/ieejfms.133.572
Publikováno v:
Journal of the Japan Society for Precision Engineering. 79:529-534
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66faf387177dcde598a47b7cf65b4a33
https://doi.org/10.2493/jjspe.79.529
https://doi.org/10.2493/jjspe.79.529
Publikováno v:
Journal of the Japan Society for Precision Engineering. 79:1224-1228
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::092a843938eb8745dee48f505a504928
https://doi.org/10.2493/jjspe.79.1224
https://doi.org/10.2493/jjspe.79.1224
Autor:
Masahito Niibe, Satoko Hori, Shozo Inoue, Keisuke Yoshiki, Kiyotoshi Fujii, Takuya Kotaka, Takahiro Namazu
Publikováno v:
Japanese Journal of Applied Physics. 52:045602
We have investigated the effects of bias voltage and substrate temperature on the growth process of RF-magnetron-sputtered BN films. When the negative bias voltage was higher than 80 V, films including the sp3-BN phase grew even if the substrate temp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::52ba6484d24fae23171645cacd76e83f
https://doi.org/10.7567/jjap.52.045602
https://doi.org/10.7567/jjap.52.045602