Zobrazeno 1 - 10
of 21
pro vyhledávání: '"Kiyoshi Awai"'
Autor:
Takahiro Yamada, Kiyoshi Awai, T. Nebiki, Tetsuya Yamamoto, Seiichi Kishimoto, T. Narusawa, Hisao Makino
Publikováno v:
Superlattices and Microstructures. 42:68-73
Polycrystalline Ga-doped (Ga content: 4 wt%) ZnO (GZO) thin films were deposited on glass substrates at 200 ∘C by a reactive plasma deposition with DC arc discharge technique. The dependences of structural and electrical properties of GZO films on
Publikováno v:
Superlattices and Microstructures. 39:218-228
Measurements of Hall effect, optical transmittance, reflectance and photoluminescence (PL) have been carried out on large area (1 m wide) polycrystalline Ga-doped ZnO (GZO) films prepared by a reactive plasma deposition (RPD) method using two plasma
Autor:
Takahiro Yamada, T. Mitsunaga, Tetsuya Yamamoto, Toshiyuki Sakemi, Kiyoshi Awai, Sho Shirakata, K. Ikeda, Seiichi Kishimoto, Minoru Osada, Hisao Makino
Publikováno v:
Superlattices and Microstructures. 38:369-376
The dependences of lattice constant, crystallite size and internal strain in the (100) direction for Ga-doped ZnO (GZO; Ga content, 3 wt%) films on O 2 gas flow rate (0–20 sccm) during deposition were investigated. GZO films have been prepared by r
Autor:
Paul Fons, Kiyoshi Awai, Hitoshi Tampo, Kakuya Iwata, Akimasa Yamada, S. Niki, Shogo Ishizuka, Toshiyuki Sakemi, Koji Matsubara, Sho Shirakata, Tetsuya Yamamoto, Keiichiro Sakurai
Publikováno v:
Thin Solid Films. :199-203
Reactive plasma deposition (RPD) is a technique for depositing a thin film on a substrate using a pressure–slope type plasma ion gun. This method offers the advantage of low-ion damage, low deposition temperature, large area deposition and high gro
Autor:
Kiyoshi Awai, Kentaro Sakai, Tetsuo Ikari, Kenji Yoshino, H. Sakemi, Hironori Komaki, T. Kakeno, Tetsuya Yamamoto
Publikováno v:
Materials Science and Engineering: B. 118:70-73
Undoped and Ga-doped (3 wt.%) n-type ZnO thin films were grown by a reactive plasma deposition method on glass substrates at 200 °C under oxygen flow rate from 0 to 50 sccm. Piezoelectric photothermal spectroscopy (PPTS) was measured for characteriz
Publikováno v:
Thin Solid Films. :439-442
Transparent and conductive Ga-doped ZnO films have been deposited at a glass substrate temperature of 200 °C using an ion plating system. The resistivity as low as 2.7×10−4 Ω cm with a high carrier concentration of 8×1020 cm−3, Hall mobility
Autor:
Keiichiro Sakurai, Kakuya Iwata, Kiyoshi Awai, Hitoshi Tampo, Tetsuya Yamamoto, Toshiyuki Sakemi, M. Matsubara, S. Niki, Shogo Ishizuka, Paul Fons, Akimasa Yamada
Publikováno v:
Thin Solid Films. :219-223
The Uramoto-gun with Tanaka magnetic field (URT)-ion plating (IP) method is a novel ion plating technique for thin film deposition. This method offers the advantage of low-ion damage, low deposition temperatures, large area deposition and high growth
Publikováno v:
Thin Solid Films. :212-218
Optical and electrical properties have been studied on thin polycrystalline ZnO films deposited on a glass substrate by Uramoto–Tanaka type ion plating (DC-arc ion-plating) method with relation to the oxygen flow rate (OFR) in the deposition chambe
Publikováno v:
SHINKU. 47:742-747
Publikováno v:
Thin Solid Films. 445:278-283
Optical and electrical properties were studied on thin polycrystalline ZnO films (200-nm thick) deposited on glass substrates at 200 °C by a DC-arc ion plating method (URamoto-Tanaka-type ion plating method). Effects of the oxygen flow rate (OFR) on