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pro vyhledávání: '"Kiyohito Kumagai"'
Autor:
Kiyohito Kumagai, Osamu Hosoda, Iwao Watanabe, Motohiro Naitou, Yuu Ohhashi, Kazumitsu Tanaka, Yasushi Kokubo, Takahide Sakata
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 10:2842
A He gas‐phase ion source having a three‐electrode acceleration lens that can change the acceleration energy and magnification independently was developed. This source allows application of acceleration voltages up to 100 kV and extraction voltag
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9c8afc9d1d50dc0a9b44e6b2d59cd7a6
https://doi.org/10.1116/1.585970
https://doi.org/10.1116/1.585970
