Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Kirsten Ruck"'
Publikováno v:
Solid State Sciences. 7:17-23
Single phase products of La1.2Sr1.8Mn2−xRuxO7 ( 0 ⩽ x ⩽ 0.5 ) were prepared by solid state reaction of La2O3, SrCO3, Mn2O3 and RuO2 in several heating cycles. The samples have been studied by X-ray powder diffraction techniques and the crystal
Publikováno v:
SPIE Proceedings.
Controlling a very tight CD budget in Photolithography is one of the challenges of the next technology nodes. The Post Exposure Bake (PEB) process is known as one of the main Litho contributors to CD non-uniformity for processes using resists with mo
Autor:
Mireia Blanco Mantecon, Tadatoshi Tomita, Kirsten Ruck, Hitoshi Kosugi, Richard Moerman, Shinichi Hatakeyama, Masashi Enomoto, Heiko Weichert, Casper Roderik De Groot, Kathleen Nafus, Shin Inoue, Raf Stegen
Publikováno v:
SPIE Proceedings.
In order to prepare for the next generation technology manufacturing, ASML and TEL are working together to investigate the process performance of the LITHIUSi+/ TWINSCAN XT:1700i lithocluster through decreasing critical dimension patterning. In this
Autor:
Konstantin Nenkov, Kathrin Doerr, Barbara Schuepp, Karl-Hartmut Mueller, Gernot Krabbes, Kirsten Ruck
Publikováno v:
ChemInform. 36
Publikováno v:
ChemInform. 31