Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Kira L. Fishgrab"'
Publikováno v:
International Symposium for Testing and Failure Analysis.
This presentation covers the basic physics needed to understand and to effectively apply backside IC analysis techniques to flip-chip packaged die. It describes the principles of light transmission through silicon and the factors that influence optic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::41939e47f7584e77225b53170f709364
https://doi.org/10.31399/asm.cp.istfa2022tpg1
https://doi.org/10.31399/asm.cp.istfa2022tpg1
Publikováno v:
International Symposium for Testing and Failure Analysis.
This presentation covers the basic physics needed to effectively apply backside IC analysis techniques to flip-chip packaged die. It describes the principles of light transmission through silicon and the factors that influence optical image formation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e823c5dbdf48d5e84d40496e13cf45bc
https://doi.org/10.31399/asm.cp.istfa2021tpg1
https://doi.org/10.31399/asm.cp.istfa2021tpg1
Autor:
Erica A. Douglas, Randy J. Shul, Christine Ford, Stephen J. Pearton, Kira L. Fishgrab, Jeffrey Stevens
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 30:06FF06
Highly anisotropic features of benzocyclobutene, a promising low stress layer for microelectromechanical systems, were achieved by inductively coupled plasma (ICP) etching with fluorine/oxygen based chemistry. The effects of chamber pressure, platen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6d0472575dfeed70ecce72ee1d29f062
https://doi.org/10.1116/1.4758765
https://doi.org/10.1116/1.4758765