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pro vyhledávání: '"Kingsly Gana"'
Autor:
Augustinas Galeckas, Robert Karsthof, Kingsly Gana, Angela Kok, Marianne Etzelmüller Bathen, Lasse Vines, Andrej Kuznetsov
Publikováno v:
Physica Status Solidi A, 220 (10)
Physica Status Solidi (a) applications and materials science
Physica Status Solidi (a) applications and materials science
The carrier lifetime control over 150 μm thick 4H-SiC epitaxial layers via thermal generation and annihilation of carbon vacancy (VC) related Z1/2 lifetime killer sites is reported. The defect developments upon typical SiC processing steps, such as