Development of a triplasmatron ion source for the generation of SF5⁺ and F^- primary ion beams on an ion microscope secondary ion mass spectrometry instrument.

Autor: Gillen, Greg, King, R. Lance, Chmara, Frank

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1999, Vol. 17 Issue 3, p845-852, 8p