Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Kimberly L. Harrison"'
Publikováno v:
Microsystem Technologies. 23:2125-2130
Nanoelectromechanical (NEM) relays show promise in a wide variety of low power applications. NEM relays have near-zero leakage current, in contrast to the relatively high leakage current of nanoscale CMOS transistors, thus enabling hybrid CMOS-NEM re
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1a5bd48fd28c77625419c4e07ebd6dd7
https://doi.org/10.1007/s00542-016-2932-1
https://doi.org/10.1007/s00542-016-2932-1
Autor:
Kimberly L. Harrison, Mohammad Shavezipur, Subhasish Mitra, H.-S. Philip Wong, Roger T. Howe, William Scott Lee
Publikováno v:
Journal of Microelectromechanical Systems. 24:592-598
This paper describes the improvement of pull-in stability, contact properties, and reliability of laterally actuated nanoelectromechanical relays by partitioning the mechanical and electrostatic domains in the relay structure. Separation of the two p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a5a9c3c429abbf16ee0534144a53132
https://doi.org/10.1109/jmems.2014.2335157
https://doi.org/10.1109/jmems.2014.2335157
Publikováno v:
Fourteenth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::99bdb897d36ccd2713d18b312105afdf
https://doi.org/10.1109/itherm.2014.6892425
https://doi.org/10.1109/itherm.2014.6892425
Autor:
Thomas W. Kenny, Kimberly L. Harrison, Yushi Yang, Roger T. Howe, David B. Heinz, Chae Hyuck Ahn, Camille L. M. Everhart, Vu A. Hong, Eldwin J. Ng
Publikováno v:
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).
A large dc bias voltage (tens of volts) is often useful for the operation of capacitive MEMS devices. Charge-biasing techniques have been demonstrated to be able to replace a bias voltage source by trapping an equivalent charge on an electrically flo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fd7d4840557e1a37629579b5cb8c606d
https://doi.org/10.1109/memsys.2014.6765882
https://doi.org/10.1109/memsys.2014.6765882
Autor:
W. S. Lee, K. Shavezipur, Kimberly L. Harrison, J. Provine, Roger T. Howe, Subhasish Mitra, Hon-Sum Philip Wong
Publikováno v:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
A novel design for a six-terminal nanoelectromechanical relay is presented. The design includes a secondary beam in the signal pathway of the device, which allows direct contact between the source and drain. The advantages of the new design include a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::edf229cb1a5b9bc9a47db9d0ae168ea3
https://doi.org/10.1109/transducers.2013.6627049
https://doi.org/10.1109/transducers.2013.6627049
Autor:
Hon-Sum Philip Wong, Mohammad Shavezipur, Subhasish Mitra, W. S. Lee, J. Provine, Kimberly L. Harrison, Roger T. Howe
Publikováno v:
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).
Laterally actuated nanoelectromechanical relays with compliant source-drain contacts are presented. The relay sidewalls are coated with a 30 nm-thick conductive layer of titanium nitride (TiN) deposited using atomic layer deposition (ALD). By hollowi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c8fc590218245c5f864a097859ae1858
https://doi.org/10.1109/memsys.2013.6474293
https://doi.org/10.1109/memsys.2013.6474293