A multivariate parameter trace analysis for online fault detection in a semiconductor etch tool.

Autor: Ko, JongMyoung¹ (AUTHOR), Kim, ChangOuk² (AUTHOR) kimco@yonsei.ac.kr

Publikováno v: International Journal of Production Research. Dec2012, Vol. 50 Issue 23, p6639-6654. 16p. 2 Diagrams, 3 Charts, 7 Graphs.

Performance trajectory-based optimised supply chain dynamics.

Autor: Shin, KyuHo, Kwon, Ick-Hyun, Lee, Jung-Hoon, Kim, ChangOuk

Publikováno v: International Journal of Computer Integrated Manufacturing; Jan2010, Vol. 23 Issue 1, p87-100, 14p, 3 Diagrams, 7 Charts, 6 Graphs