Zobrazeno 1 - 8 of 8 pro vyhledávání: '"Kihun Lee"'
2
Design of a discrete flexure for a SiC deformable mirror with PMN stacked-actuators
Autor: Kihun Lee, Joon Young Huh, Hyug-Gyo Rhee, Pilseong Kang, Sangyeong Park
Publikováno v: Optics express. 29(20)
In the present work, a discrete flexure for silicon carbide (SiC) deformable mirror (DM) with Lead-Magnesium-Niobate (PMN) stacked-actuators is designed using topology and size optimizations. In order to fulfill the designated surface strokes of the
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::610685b80d8d003a090ea5b2eeda2102
https://pubmed.ncbi.nlm.nih.gov/34615264
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3
Effect of spray nozzle position on pad temperature distribution and wafer non-uniformity
Autor: Donghwan Lee, Seonho Jeong, Dasol Lee, Haedo Jeong, Kihun Lee
Publikováno v: Journal of Mechanical Science and Technology. 33:5677-5682
During chemical mechanical planarization (CMP), the pad surface temperature generally increases due to the friction between the wafer and the pad. A pad with a large sliding distance generates more heat compared to pad with small sliding distance. A
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a25a8686175ce0d1416e0d0bda8ee572
https://doi.org/10.1007/s12206-019-1110-7
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Plný text Recenzováno Digitální knihovna AV ČR
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