Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Ki-Ho Bae"'
Autor:
Seung-Hoon Choi, Melissa E. Kreider, Adam C. Nielander, Michaela Burke Stevens, Gaurav Ashish Kamat, Ja Eung Koo, Ki Ho Bae, Hoyoung Kim, Il Young Yoon, Bo Un Yoon, Kihyun Hwang, Dong Un Lee, Thomas F. Jaramillo
Publikováno v:
Applied Surface Science. 598:153767
Autor:
Ki Ho Bae
Publikováno v:
EPOCH AND PHILOSOPHY. 30:141-169
Publikováno v:
Korean Journal of Otorhinolaryngology-Head and Neck Surgery. 62:108-113
Autor:
Ye Won Lee, Jong In Jeong, Jun Wan Park, Bon Min Koo, Soon Hyung Park, Ki Ho Bae, Sung Il Nam
Publikováno v:
Korean Journal of Otorhinolaryngology-Head and Neck Surgery. 60:599-604
Publikováno v:
Journal of Clinical Otolaryngology Head and Neck Surgery. 28:228-233
Publikováno v:
Journal of Applied Physics. 130:163304
Inductively coupled plasmas driven by pulsed RF power have been used by the semiconductor industry for decades as they offer numerous advantages compared to continuous mode discharges. Current state-of-the-art global models characterize the plasma un
Publikováno v:
ECS Journal of Solid State Science and Technology. 10:024011
The effect of surface composition change based on complexing agents on cobalt (Co) post-chemical mechanical polishing cleaning (cleaning) is investigated. The change in chemical composition of the Co surface significantly affects Co cleaning performa
Publikováno v:
Microelectronic Engineering. 162:17-22
A cleaning solution has been introduced to remove the residue from Cu substrate after the Cu chemical mechanical polishing (CMP) process. In this study, the effects of complexing agents on the performance of cleaning solutions were studied depending
Autor:
Ki-Ho Bae
Publikováno v:
The Journal of Humanities. 41:53-80
Publikováno v:
Microelectronic Engineering. 227:111308
The effect of complexing agents on Co oxidation/dissolution in alkaline solution was investigated for Co chemical-mechanical polishing (CMP) and post-CMP cleaning processes. The oxidation and dissolution properties of Co in a solution are greatly aff