Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Khodr Maamari"'
Autor:
Heinz H. Busta, Tatjana Dankovic, Poya Yasaei, Khodr Maamari, E. Tsang, N. Strach, A. Meyer, Alan Feinerman, Mrinal Mathur, Tejumade Durowade, A. Solat, J. Huang, Amirhossein Behranginia, J. Lee, Mohsen Purahmad, A. Raghunathan, S. Chang, I. Mohedano, K. Spratt, N. Krzyzanowski, H. Tahiru, M. Gouk, J. Counts, M. Valencia, X. Cui, M. Silvestri, X. Zhang, Maksym Plakhotnyuk
Publikováno v:
2013 26th International Vacuum Nanoelectronics Conference (IVNC).
A 20nm thick Ni resistor element was fabricated on a 1μm thick, 400μm wide silicon nitride bridge via bulk micromachining. By applying a given power to the resistor its temperature increases, as the pressure decreases, since fewer gas particles are
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5700c87e2836e00bb8fe6813a02a8262
https://doi.org/10.1109/ivnc.2013.6624737
https://doi.org/10.1109/ivnc.2013.6624737
Autor:
Seyoung An, Tomasz Grzebyk, Khodr Maamari, Jan Dziuban, Anna Gorecka-Drzazga, Heinz H. Busta, Tatjana Dankovic, Alan Feinerman
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 33:03C103
The paper concerns the problems associated with the generation and measurement of vacuum in small-volume microelectromechanical (MEMS) devices. A concept of equipping vacuum MEMS with miniature vacuum pump and gauge has been presented. The ion-sorpti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::66bba0f96fa88af17e6d221b930805b8
https://doi.org/10.1116/1.4903448
https://doi.org/10.1116/1.4903448