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pro vyhledávání: '"Khim, Young Rok"'
Autor:
Khim, Yeong Gwang, Park, Beomjin, Heo, Jin Eun, Khim, Young Hun, Khim, Young Rok, Gu, Minsun, Rhee, Tae Gyu, Chang, Seo Hyoung, Han, Moonsup, Chang, Young Jun
Publikováno v:
Journal of the Korean Physical Society 82, 486 (2023)
Titanium nitride (TiN) presents superior electrical conductivity with mechanical and chemical stability and compatibility with the semiconductor fabrication process. Here, we fabricated epitaxial and polycrystalline TiN (111) thin films on MgO (111),
Externí odkaz:
http://arxiv.org/abs/2310.14208
